Document Type
Journal Article
Role
Author
Standard Number
1071-1023
Journal Title
Journal of Vacuum Science and Technology. B
Volume
9
Issue
2
First Page
1380
Last Page
1383
Publication Date
1991
Repository Citation
Ehrichs, E. E., Walter Fox Smith, and A. L. de Lozanne. "A scanning tunneling microscope/scanning electron microscope system for the fabrication of nanostructures." Journal of Vacuum Science & Technology B 9.2 (1991): 1380-1383.
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