Document Type

Journal Article

Role

Author

Standard Number

1071-1023

Journal Title

Journal of Vacuum Science and Technology. B

Volume

7

Issue

6

First Page

1967

Last Page

1970

Publication Date

1989

Download

Share

COinS
 
 

To view the content in your browser, please download Adobe Reader or, alternately,
you may Download the file to your hard drive.

NOTE: The latest versions of Adobe Reader do not support viewing PDF files within Firefox on Mac OS and if you are using a modern (Intel) Mac, there is no official plugin for viewing PDF files within the browser window.