A Scanning Tunneling Microscope/Scanning Electron Microscope System for the Fabrication of Nanostructures

Authors

Edward E. Ehrichs
Walter Fox Smith, Haverford CollegeFollow
A. L. de Lozanne

Document Type

Journal Article

Role

Author

Published In

Journal of Vacuum Science and Technology. B

Volume

9

Issue

2

First Page

1380

Last Page

1383

Publication Date

1991

Suggested Citation

Ehrichs, E. E., Walter Fox Smith, and A. L. de Lozanne. "A scanning tunneling microscope/scanning electron microscope system for the fabrication of nanostructures." Journal of Vacuum Science & Technology B 9.2 (1991): 1380-1383.