"Novel Ultrahigh Vacuum Manipulator Using a Shape-memory Alloy Actuator" by Alejandro L. de Lozanne, Edward E. Ehrichs et al.
 

Document Type

Journal Article

Role

Author

Standard Number

0734-2101

Journal Title

Journal of Vacuum Science and Technology. A

Volume

10

Issue

3

First Page

576

Last Page

577

Publication Date

1992

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