Document Type
Journal Article
Role
Author
Published In
Journal of Vacuum Science and Technology. A
Volume
18
Issue
1
First Page
290
Last Page
292
Publication Date
2000
Suggested Citation
Smith, Walter Fox, B. G. Stokes, and J. F. Crawford. "Cryogenic substrate cooling or substrate heating without vacuum feedthroughs." JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A VACUUMS SURFACES AND FILMS 18.1 (2000): 290-292.
